Cylindrical arsine-phosphine exhaust gas adsorbent 
Catalog Number WGAM-1441
Product Name Cylindrical arsine-phosphine exhaust gas adsorbent
Size 1 kg; 5 kg; 10 kg; 25 kg; 50 kg; 100 kg; 500 kg; 1000 kg; 1500 kg
Appearance Solid
Cylindrical arsine-phosphine exhaust gas adsorbent is a highly efficient dry adsorbent widely used in the semiconductor industry. It adopts active metal oxides and alkaline metal oxides as the main active ingredients, and reacts chemically with arsine-phosphine exhaust gas, thus realizing the standard emission of exhaust gas.
| Particle Size | Φ3 mm |
| Packing Density | ~560 g/ml |
| Specific Surface Area | ~670 m2/g |
| Particle Strength | 153 N |
| Water Content | <10% |
| Temperature Resistance | 350°C |
| Processing Efficiency | >99% |
| Appearance | Solid |
| AsH3 | 65.2 L/L |
| PH3 | 60.3 L/L |
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